{"doi":"10.3390/mi13111892","title":"Glass-to-Glass Fusion Bonding Quality and Strength Evaluation with Time, Applied Force, and Heat","abstract":"A bonding process was developed for glass-to-glass fusion bonding using Borofloat 33 wafers, resulting in high bonding yield and high flexural strength. The Borofloat 33 wafers went through a two-step process with a pre-bond and high-temperature bond in a furnace. The pre-bond process included surface activation bonding using O2 plasma and N2 microwave (MW) radical activation, where the glass wafers were brought into contact in a vacuum environment in an EVG 501 Wafer Bonder. The optimal hold time in the EVG 501 Wafer bonder was investigated and concluded to be a 3 h hold time. The bonding parameters in the furnace were investigated for hold time, applied force, and high bonding temperature. It was concluded that the optimal parameters for glass-to-glass Borofloat 33 wafer bonding were at 550 °C with a hold time of 1 h with 550 N of applied force.","journal":"Micromachines","year":2022,"id":267807,"datarank":0.31191623125197543,"base_score":2.0794415416798357,"endowment":2.0794415416798357,"self_citation_contribution":0.31191623125197543,"citation_network_contribution":0.0,"self_endowment_contribution":0.31191623125197543,"citer_contribution":0.0,"corpus_percentile":null,"corpus_rank":null,"citation_count":7,"citer_count":0,"citers_with_citation_signal":0,"citers_with_endowment":0,"datacite_reuse_total":0,"is_dataset":false,"is_dataset_confidence":0.9511,"is_data_producer":false,"deposit_databanks":null,"is_oa":true,"file_count":0,"downloads":0,"has_version_chain":false,"published_date":"2022-01-01","fair_score":null,"fair_percentile":null,"algorithm_id":"datarank_citation_only_1hop_v6","ranking_scope":"data_only","authors":[{"id":406044,"name":"Leslie A. Simms","orcid":null,"position":1,"is_corresponding":false},{"id":511665,"name":"Bradley S. Chew","orcid":"0000-0003-0049-113X","position":2,"is_corresponding":false},{"id":604171,"name":"Alexander Weinstein","orcid":null,"position":3,"is_corresponding":false},{"id":928934,"name":"Valeria La Saponara","orcid":"0000-0002-7963-262X","position":4,"is_corresponding":false},{"id":405258,"name":"Mitchell M. McCartney","orcid":"0000-0001-7236-8400","position":5,"is_corresponding":false},{"id":313854,"name":"Nicholas J. Kenyon","orcid":"0000-0001-8839-4400","position":6,"is_corresponding":false},{"id":313856,"name":"Cristina E. Davis","orcid":"0000-0002-9878-7758","position":7,"is_corresponding":false},{"id":929371,"name":"Nhi N. Trinh","orcid":null,"position":0,"is_corresponding":true}],"reference_count":40,"raw_metadata":{"citation_network_status":"fetched"},"created_at":"2026-07-19T00:27:06.198948Z","pmid":"36363914","pmcid":null,"fwci":null,"citation_percentile":null,"influential_citations":0,"oa_status":null,"license":null,"views":0,"total_file_size_bytes":0,"version_count":0,"fair_f":null,"fair_a":null,"fair_i":null,"fair_r":null,"fair_zscore":null,"fair_rationale":null,"fair_model":null,"fair_agent_version":null,"fair_fulltext_source":null,"fair_has_llm":null,"fair_computed_at":null,"clinical_trials":[],"software_tools":[],"db_accessions":[],"linked_datasets":[],"topics":[]}