{"doi":"10.31224/osf.io/2wgrc","title":"Influence of air masses on microphone vibration sensitivity","abstract":"A study is presented of the primary design parameters that influence the vibration sensitivity of a microphone. The sensitivity to vibration is generally determined by the mass of the pressure-sensing diaphragm along with the mass of air that moves with it. The sound-sensing performance is improved as the pressure-sensing diaphragm is made thinner, but for a thin enough diaphragm, the moving air mass is not negligible relative to that of the diaphragm itself. In the present study, we develop a simple duct-acoustic model to account for the effect of the co-vibrating air. It is shown that an idealized massless, thin microphone diaphragm will still produce unwanted vibration signal due to acceleration of the air masses within the microphone. For a small microphone, the predicted pressure related acceleration sensitivity is found to be a simple function of the mass per unit area of the air inside of the microphone package. The acceleration sensitivity predicted using a finite element model of a one micrometer thick clamped flexible silicon diaphragm agrees with that predicted by the simple duct model. Measured and predicted acceleration sensitivities are compared for several MEMS and sub-miniature electret microphones of different back volume lengths . It is found that the primary design parameter determining vibration sensitivity for these microphones is the effective length of the column of air inside the microphone’s packaging. Microphones that have longer air-filled volumes had greater pressure related acceleration sensitivity.","journal":"EngrXiv (OSF Preprints)","year":2021,"id":227952,"datarank":0.0,"base_score":0.0,"endowment":0.0,"self_citation_contribution":0.0,"citation_network_contribution":0.0,"self_endowment_contribution":0.0,"citer_contribution":0.0,"corpus_percentile":null,"corpus_rank":null,"citation_count":0,"citer_count":0,"citers_with_citation_signal":0,"citers_with_endowment":0,"datacite_reuse_total":0,"is_dataset":false,"is_dataset_confidence":0.952,"is_data_producer":false,"deposit_databanks":null,"is_oa":true,"file_count":0,"downloads":0,"has_version_chain":false,"published_date":"2021-01-01","fair_score":null,"fair_percentile":null,"algorithm_id":"datarank_citation_only_1hop_v6","ranking_scope":"data_only","authors":[{"id":809491,"name":"Ronald N. Miles","orcid":"0000-0001-7245-9345","position":1,"is_corresponding":false},{"id":832310,"name":"Jonathan D. Walsh","orcid":"0000-0001-9931-7689","position":0,"is_corresponding":true}],"reference_count":8,"raw_metadata":null,"created_at":"2026-07-18T23:54:46.312854Z","pmid":null,"pmcid":null,"fwci":null,"citation_percentile":null,"influential_citations":0,"oa_status":null,"license":null,"views":0,"total_file_size_bytes":0,"version_count":0,"fair_f":null,"fair_a":null,"fair_i":null,"fair_r":null,"fair_zscore":null,"fair_rationale":null,"fair_model":null,"fair_agent_version":null,"fair_fulltext_source":null,"fair_has_llm":null,"fair_computed_at":null,"clinical_trials":[],"software_tools":[],"db_accessions":[],"linked_datasets":[],"topics":[]}