{"doi":"10.31219/osf.io/bxkng","title":"Investigation of High Sensitivity Piezoresistive Pressure Sensors for -0.5…+0.5 kPa","abstract":"<p>The investigation of the pressure sensor chip's design developed for operation in ultralow differential pressure ranges has been conducted. The optimum geometry of a diaphragm has been defined using available technological resources. The pressure sensor chip with an area of 6.15 × 6.15 mm has an average sensitivity S of 34.5 mV/ κPa/V at nonlinearity 2K NL = 0.81 %FS and thermal hysteresis up to 0.6 %FS was created. Owing to the chip connection with stop elements, the burst pressure reaches 450 κPa. The developed pressure sensor can be used in medicine, automotive industry and highly specialized scientific developments.</p>","journal":"OSF Preprints (OSF Preprints)","year":null,"id":30303,"datarank":0.0,"base_score":0.0,"endowment":0.0,"self_citation_contribution":0.0,"citation_network_contribution":0.0,"self_endowment_contribution":0.0,"citer_contribution":0.0,"corpus_percentile":null,"corpus_rank":null,"citation_count":0,"citer_count":0,"citers_with_citation_signal":0,"citers_with_endowment":0,"datacite_reuse_total":0,"is_dataset":false,"is_dataset_confidence":null,"is_data_producer":false,"deposit_databanks":null,"is_oa":false,"file_count":0,"downloads":0,"has_version_chain":false,"published_date":null,"fair_score":null,"fair_percentile":null,"algorithm_id":"datarank_citation_only_1hop_v6","ranking_scope":"data_only","authors":[{"id":164894,"name":"Denis Prigodskiy","orcid":null,"position":1,"is_corresponding":false},{"id":164893,"name":"Mikhail","orcid":"0000-0003-0798-4500","position":0,"is_corresponding":false}],"reference_count":0,"raw_metadata":{"has_enrichment":true,"base_score":0.0,"endowment":0.0,"datacite_reuse_total":0,"file_count":0,"downloads":0,"views":0,"has_version_chain":false,"is_dataset":false,"is_oa":false,"pmid":"18998881","pmcid":null,"openalex_id":"https://openalex.org/W4250725048","authors":[],"funders":[],"total_grants":0,"fwci":0.0,"citation_percentile":0.19370344,"influential_citations":0,"citation_trend":[],"oa_status":"gold","license":"cc-by","oa_locations":[{"url":"https://osf.io/bxkng/download","host_type":""},{"url":"https://osf.io/bxkng/download","host_type":""},{"url":"https://doi.org/10.31219/osf.io/bxkng","host_type":""},{"url":"https://osf.io/bxkng","host_type":"repository"},{"url":"http://doi.org/10.31219/OSF.IO/BXKNG","host_type":"repository"}],"fields_of_study":["Advanced MEMS and NEMS Technologies","Mechanical and Optical Resonators","Sensor Technology and Measurement Systems"],"mesh_terms":[],"keywords":["Pressure sensor","Sensitivity (control systems)","Chip","Diaphragm (acoustics)","Materials science","Hysteresis","Piezoresistive effect","Differential pressure","Electrical engineering","Microelectromechanical systems","Automotive industry","Optoelectronics","Mechanical engineering","Electronic engineering","Engineering","Mechanics","Physics","Aerospace engineering","Condensed matter physics"],"sdg_mappings":[{"sdg_number":0,"sdg_label":"Industry, innovation and infrastructure"}],"linked_datasets":[],"clinical_trials":[],"software_tools":[],"database_accessions":[],"source":"live","citation_network_status":"fetched"},"created_at":"2026-06-09T02:13:34.789690Z","pmid":null,"pmcid":null,"fwci":null,"citation_percentile":null,"influential_citations":0,"oa_status":null,"license":null,"views":0,"total_file_size_bytes":0,"version_count":0,"fair_f":null,"fair_a":null,"fair_i":null,"fair_r":null,"fair_zscore":null,"fair_rationale":null,"fair_model":null,"fair_agent_version":null,"fair_fulltext_source":null,"fair_has_llm":null,"fair_computed_at":null,"clinical_trials":[],"software_tools":[],"db_accessions":[],"linked_datasets":[],"topics":[]}