{"doi":"10.1364/prj.521172","title":"Twenty-nine million intrinsic <i>Q</i>-factor monolithic microresonators on thin-film lithium niobate","abstract":"The recent emergence of thin-film lithium niobate (TFLN) has extended the landscape of integrated photonics. This has been enabled by the commercialization of TFLN wafers and advanced nanofabrication of TFLN such as high-quality dry etching. However, fabrication imperfections still limit the propagation loss to a few dB/m, restricting the impact of this platform. Here, we demonstrate TFLN microresonators with a record-high intrinsic quality ( Q ) factor of twenty-nine million, corresponding to an ultra-low propagation loss of 1.3 dB/m. We present spectral analysis and the statistical distribution of Q factors across different resonator geometries. Our work pushes the fabrication limits of TFLN photonics to achieve a Q factor within 1 order of magnitude of the material limit.","journal":"Photonics Research","year":2024,"id":417693,"datarank":0.0,"base_score":0.0,"endowment":0.0,"self_citation_contribution":0.0,"citation_network_contribution":0.0,"self_endowment_contribution":0.0,"citer_contribution":0.0,"corpus_percentile":null,"corpus_rank":null,"citation_count":63,"citer_count":0,"citers_with_citation_signal":0,"citers_with_endowment":0,"datacite_reuse_total":0,"is_dataset":false,"is_dataset_confidence":0.9539,"is_data_producer":false,"deposit_databanks":null,"is_oa":false,"file_count":0,"downloads":0,"has_version_chain":false,"published_date":"2024-01-01","fair_score":null,"fair_percentile":null,"algorithm_id":"datarank_citation_only_1hop_v6","ranking_scope":"data_only","authors":[{"id":874218,"name":"Yaowen Hu","orcid":"0000-0002-0127-1959","position":1,"is_corresponding":false},{"id":1204880,"name":"Shengyuan Lu","orcid":null,"position":2,"is_corresponding":false},{"id":1204033,"name":"Hana Warner","orcid":"0000-0002-5068-2885","position":3,"is_corresponding":false},{"id":1204034,"name":"Xudong Li","orcid":"0000-0002-4667-062X","position":4,"is_corresponding":false},{"id":1204035,"name":"Yunxiang Song","orcid":"0000-0003-3879-4777","position":5,"is_corresponding":false},{"id":1204036,"name":"Letícia Magalhães","orcid":"0000-0002-7023-5724","position":6,"is_corresponding":false},{"id":1204037,"name":"Amirhassan Shams‐Ansari","orcid":"0000-0002-2165-7832","position":7,"is_corresponding":false},{"id":1204038,"name":"Andrea Cordaro","orcid":"0000-0003-3000-7943","position":8,"is_corresponding":false},{"id":874615,"name":"Neil Sinclair","orcid":null,"position":9,"is_corresponding":false},{"id":874222,"name":"Marko Lončar","orcid":"0000-0002-5029-5017","position":10,"is_corresponding":false},{"id":1204032,"name":"Xinrui Zhu","orcid":"0009-0006-6357-5444","position":0,"is_corresponding":true}],"reference_count":65,"raw_metadata":null,"created_at":"2026-07-19T01:56:56.807779Z","pmid":null,"pmcid":null,"fwci":null,"citation_percentile":null,"influential_citations":0,"oa_status":null,"license":null,"views":0,"total_file_size_bytes":0,"version_count":0,"fair_f":null,"fair_a":null,"fair_i":null,"fair_r":null,"fair_zscore":null,"fair_rationale":null,"fair_model":null,"fair_agent_version":null,"fair_fulltext_source":null,"fair_has_llm":null,"fair_computed_at":null,"clinical_trials":[],"software_tools":[],"db_accessions":[],"linked_datasets":[],"topics":[]}