{"doi":"10.1364/oe.471060","title":"Dual-comb ranging method for simultaneously measuring the refractive index and surface spacing in a multi-lens system","abstract":"<jats:p>Precise determination of the refractive index and surface spacing in multi-lens system is essential for ultra-precision system performance, such as lithography objectives with strict requirements for each lens fabrication and assembly position. Generally, the nominal value of the refractive index at a given wavelength must be known before resolving the geometric thickness of multi-lens using conventional methods, which leads to inaccurate and inconvenient measurements. We propose a method to simultaneously measure the refractive index and surface spacing in multi-lens system based on dual-comb ranging method. The precision of the thickness measurement is better than 0.18 µm, and the refractive index is better than 1.6 × 10<jats:sup>−4</jats:sup>. This study provides a potential solution for realizing the real-time, fast, and precise measurement of the geometric thickness and assembly position of multi-lens in lithography objectives.</jats:p>","journal":"Optics Express","year":2022,"id":25145,"datarank":0.41725164725175246,"base_score":1.9459101490553132,"endowment":1.9459101490553132,"self_citation_contribution":0.29188652235829704,"citation_network_contribution":0.12536512489345542,"self_endowment_contribution":0.29188652235829704,"citer_contribution":0.12536512489345542,"corpus_percentile":null,"corpus_rank":null,"citation_count":6,"citer_count":5,"citers_with_citation_signal":3,"citers_with_endowment":3,"datacite_reuse_total":0,"is_dataset":false,"is_dataset_confidence":null,"is_oa":false,"file_count":0,"downloads":0,"has_version_chain":false,"published_date":null,"fair_score":null,"fair_percentile":null,"algorithm_id":"datarank_citation_only_1hop_v6","ranking_scope":"data_only","authors":[{"id":148715,"name":"Siyu Zhou","orcid":"0000-0002-0628-9808","position":1,"is_corresponding":false},{"id":148716,"name":"Ruixue Zhang","orcid":"0000-0001-9002-8928","position":2,"is_corresponding":false},{"id":148717,"name":"Guanhao Wu","orcid":"0000-0002-0814-2578","position":3,"is_corresponding":false},{"id":148712,"name":"Chen Lin","orcid":"0000-0001-6134-020X","position":0,"is_corresponding":false}],"reference_count":0,"raw_metadata":{"has_enrichment":true,"base_score":1.9459101490553132,"endowment":1.9459101490553132,"datacite_reuse_total":0,"file_count":0,"downloads":0,"views":0,"has_version_chain":false,"is_dataset":false,"is_oa":false,"pmid":"36558564","pmcid":null,"openalex_id":"https://openalex.org/W4309040613","authors":[],"funders":[{"funder_name":"National Natural Science Foundation of China","grant_id":"92150104","title":null}],"total_grants":1,"fwci":0.7643,"citation_percentile":0.70812595,"influential_citations":0,"citation_trend":[{"year":2023,"count":2},{"year":2024,"count":1},{"year":2025,"count":2},{"year":2026,"count":1}],"oa_status":"gold","license":"https://doi.org/10.1364/OA_License_v2#VOR-OA","oa_locations":[{"url":"https://doi.org/10.1364/oe.471060","host_type":"journal"},{"url":"https://doi.org/10.1364/oe.471060","host_type":"GOLD"},{"url":"https://doi.org/10.1364/oe.471060","host_type":"publisher"},{"url":"https://opg.optica.org/viewmedia.cfm?URI=oe-30-26-46001&seq=0","host_type":"publisher"},{"url":"https://pubmed.ncbi.nlm.nih.gov/36558564","host_type":"repository"}],"fields_of_study":["Advanced Fiber Laser Technologies","Advanced Measurement and Metrology Techniques","Advanced Fiber Optic Sensors","Medicine","Physics","Engineering"],"mesh_terms":[],"keywords":["Optics","Lens (geology)","Refractive index","Ranging","Materials science","Lithography","Gradient-index optics","Position (finance)","System of measurement","Fabrication","Physics","Computer science","Telecommunications"],"sdg_mappings":[],"linked_datasets":[],"clinical_trials":[],"software_tools":[],"database_accessions":[],"source":"live","citation_network_status":"fetched"},"created_at":"2026-06-08T00:11:37.608409Z","pmid":null,"pmcid":null,"fwci":null,"citation_percentile":null,"influential_citations":0,"oa_status":null,"license":null,"views":0,"total_file_size_bytes":0,"version_count":0,"fair_f":null,"fair_a":null,"fair_i":null,"fair_r":null,"fair_zscore":null,"fair_rationale":null,"fair_model":null,"fair_agent_version":null,"fair_fulltext_source":null,"fair_has_llm":null,"fair_computed_at":null,"clinical_trials":[],"software_tools":[],"db_accessions":[],"linked_datasets":[],"topics":[]}