{"doi":"10.1149/1.2908629","title":"Scanning Probe Microscopy for Dielectric and Metal Characterization","abstract":"<jats:p>The properties of both insulators and metals can be characterized capacitively with scanning probe microscopy, though the techniques employed are different. Intermittent contact scanning capacitance microscopy (IC-SCM) is a useful technique for characterizing the dielectric constant of insulators. Scanning Kelvin force microscopy (SKFM) can image potential distributions and work functions within conductors. Both techniques depend on the capacitance between the tip and sample, which has an inverse square dependence on tip-sample separation, limiting spatial resolution. A differential data acquisition technique to improve spatial resolution is described.</jats:p>","journal":"ECS Transactions","year":2008,"id":28086,"datarank":0.16479184330021646,"base_score":1.0986122886681096,"endowment":1.0986122886681096,"self_citation_contribution":0.16479184330021646,"citation_network_contribution":0.0,"self_endowment_contribution":0.16479184330021646,"citer_contribution":0.0,"corpus_percentile":null,"corpus_rank":null,"citation_count":2,"citer_count":2,"citers_with_citation_signal":0,"citers_with_endowment":0,"datacite_reuse_total":0,"is_dataset":false,"is_dataset_confidence":null,"is_data_producer":false,"deposit_databanks":null,"is_oa":false,"file_count":0,"downloads":0,"has_version_chain":false,"published_date":null,"fair_score":null,"fair_percentile":null,"algorithm_id":"datarank_citation_only_1hop_v6","ranking_scope":"data_only","authors":[{"id":158258,"name":"Thomas R. Walker","orcid":null,"position":1,"is_corresponding":false},{"id":158257,"name":"Joseph J. Kopanski","orcid":null,"position":0,"is_corresponding":false}],"reference_count":0,"raw_metadata":{"has_enrichment":true,"base_score":1.0986122886681096,"endowment":1.0986122886681096,"datacite_reuse_total":0,"file_count":0,"downloads":0,"views":0,"has_version_chain":false,"is_dataset":false,"is_oa":false,"pmid":"18998881","pmcid":null,"openalex_id":"https://openalex.org/W2014435277","authors":[],"funders":[],"total_grants":0,"fwci":0.234,"citation_percentile":0.5588846,"influential_citations":0,"citation_trend":[{"year":2023,"count":1}],"oa_status":"closed","license":"https://iopscience.iop.org/info/page/text-and-data-mining","oa_locations":[{"url":"https://iopscience.iop.org/article/10.1149/1.2908629/pdf","host_type":"publisher"},{"url":"https://iopscience.iop.org/article/10.1149/1.2908629","host_type":"publisher"},{"url":"https://syndication.highwire.org/content/doi/10.1149/1.2908629","host_type":"publisher"},{"url":"https://doi.org/10.1149/1.2908629","host_type":"journal"}],"fields_of_study":["Force Microscopy Techniques and Applications","Surface and Thin Film Phenomena","Electron and X-Ray Spectroscopy Techniques","Materials Science","Engineering","Physics"],"mesh_terms":[],"keywords":["Scanning capacitance microscopy","Vibrational analysis with scanning probe microscopy","Scanning ion-conductance microscopy","Scanning probe microscopy","Materials science","Microscopy","Dielectric","Kelvin probe force microscope","Conductive atomic force microscopy","Scanning confocal electron microscopy","Non-contact atomic force microscopy","Capacitance","Resolution (logic)","Atomic force acoustic microscopy","Scanning gate microscopy","Image resolution","Scanning electron microscope","Characterization (materials science)","Differential capacitance","Limiting","Optics","Optoelectronics","Nanotechnology","Atomic force microscopy","Electrode","Chemistry","Magnetic force microscope","Physics","Composite material","Computer science"],"sdg_mappings":[],"linked_datasets":[],"clinical_trials":[],"software_tools":[],"database_accessions":[],"source":"live","citation_network_status":"fetched"},"created_at":"2026-06-08T20:27:20.368824Z","pmid":null,"pmcid":null,"fwci":null,"citation_percentile":null,"influential_citations":0,"oa_status":null,"license":null,"views":0,"total_file_size_bytes":0,"version_count":0,"fair_f":null,"fair_a":null,"fair_i":null,"fair_r":null,"fair_zscore":null,"fair_rationale":null,"fair_model":null,"fair_agent_version":null,"fair_fulltext_source":null,"fair_has_llm":null,"fair_computed_at":null,"clinical_trials":[],"software_tools":[],"db_accessions":[],"linked_datasets":[],"topics":[]}