{"doi":"10.1121/10.0036772","title":"Bioinspired flow-sensing capacitive microphone","abstract":"Inspired by the auditory systems of small animals, such as spiders, the tachinid fly, Ormia ochracea, and mosquitoes, a novel low-noise, flow-sensing capacitive MEMS microphone capable of sensing acoustic particle velocity is introduced. Unlike conventional microphones that have a diaphragm for sensing sound pressure, this design consists of a thin, porous, movable structure that is intended to be driven by viscous forces as a result of the sound-induced flow. This viscous force then rotates the movable structure around a middle central hinge and creates a change in capacitance caused by a relative motion between neighboring beams. The whole structure is made of one layer of silicon using a silicon-on-insulator (SOI) wafer using photolithography technology with a device layer thickness of 5 μm. The movable part has dimensions of 0.7 mm × 1.2 mm and is placed above a cavity inside the bulk silicon that facilitates the flow of sound particles. This microphone responds to flow (a vector) rather than pressure (a scalar). Ultimately, experimental results demonstrate a sensitivity of approximately 5 mV/Pa, a noise floor between 10-4 and 10-5 Pa/Hz, and directivity ratios reaching up to 77 at 2000 Hz, underscoring its potential for high-performance acoustic applications.","journal":"The Journal of the Acoustical Society of America","year":2025,"id":525818,"datarank":0.0,"base_score":0.0,"endowment":0.0,"self_citation_contribution":0.0,"citation_network_contribution":0.0,"self_endowment_contribution":0.0,"citer_contribution":0.0,"corpus_percentile":null,"corpus_rank":null,"citation_count":3,"citer_count":0,"citers_with_citation_signal":0,"citers_with_endowment":0,"datacite_reuse_total":0,"is_dataset":false,"is_dataset_confidence":0.9559,"is_data_producer":false,"deposit_databanks":null,"is_oa":true,"file_count":0,"downloads":0,"has_version_chain":false,"published_date":"2025-01-01","fair_score":null,"fair_percentile":null,"algorithm_id":"datarank_citation_only_1hop_v6","ranking_scope":"data_only","authors":[{"id":1340256,"name":"Weili Cui","orcid":null,"position":1,"is_corresponding":false},{"id":1282729,"name":"Mahdi Farahikia","orcid":"0000-0002-0867-868X","position":2,"is_corresponding":false},{"id":809488,"name":"Junpeng Lai","orcid":"0000-0003-1130-3042","position":3,"is_corresponding":false},{"id":1112744,"name":"Morteza Karimi","orcid":"0000-0002-8745-0818","position":4,"is_corresponding":false},{"id":1282732,"name":"Changhong Ke","orcid":"0000-0002-5170-9859","position":5,"is_corresponding":false},{"id":809491,"name":"Ronald N. Miles","orcid":"0000-0001-7245-9345","position":6,"is_corresponding":false},{"id":1340014,"name":"Johar Pourghader","orcid":"0000-0002-3486-8153","position":0,"is_corresponding":true}],"reference_count":36,"raw_metadata":null,"created_at":"2026-07-19T02:50:25.860105Z","pmid":"40408298","pmcid":null,"fwci":null,"citation_percentile":null,"influential_citations":0,"oa_status":null,"license":null,"views":0,"total_file_size_bytes":0,"version_count":0,"fair_f":null,"fair_a":null,"fair_i":null,"fair_r":null,"fair_zscore":null,"fair_rationale":null,"fair_model":null,"fair_agent_version":null,"fair_fulltext_source":null,"fair_has_llm":null,"fair_computed_at":null,"clinical_trials":[],"software_tools":[],"db_accessions":[],"linked_datasets":[],"topics":[]}