{"doi":"10.1117/12.250957","title":"Fabrication of microstructures by ion beam micromachining","abstract":null,"journal":"SPIE Proceedings","year":1996,"id":683468,"datarank":0.0,"base_score":0.0,"endowment":0.0,"self_citation_contribution":0.0,"citation_network_contribution":0.0,"self_endowment_contribution":0.0,"citer_contribution":0.0,"corpus_percentile":null,"corpus_rank":null,"citation_count":0,"citer_count":0,"citers_with_citation_signal":0,"citers_with_endowment":0,"datacite_reuse_total":0,"is_dataset":false,"is_dataset_confidence":null,"is_data_producer":false,"deposit_databanks":null,"is_oa":false,"file_count":0,"downloads":0,"has_version_chain":false,"published_date":null,"fair_score":null,"fair_percentile":null,"algorithm_id":"datarank_citation_only_1hop_v6","ranking_scope":"data_only","authors":[{"id":1785438,"name":"D. A. Hayton","orcid":null,"position":1,"is_corresponding":false},{"id":1785439,"name":"Kazuyoshi Tsuchiya","orcid":null,"position":2,"is_corresponding":false},{"id":1785437,"name":"Sam T. Davies","orcid":null,"position":0,"is_corresponding":false}],"reference_count":0,"raw_metadata":{"has_enrichment":true,"resolved":true,"title":"Fabrication of microstructures by ion beam micromachining","abstract":"The use of non-focused and focused ion beams as tools for fabrication and assembly of microstructures is described. Non-focused, low energy (< 1.5 keV) and high current density (< 100 mA cm<SUP>-2</SUP>) argon ion beams produced by a Kaufman-type source have been used for ultra-precision micromachining of materials for microelectromechanical systems applications. Uniform material removal rates of up to 1 micrometers min<SUP>-1</SUP> without reactive etching are achieved during stencil-mask milling of micro-parts or during pattern transfer into ceramic or semiconductor substrates by photolithography followed by ion milling. Micro-components with typical dimensions in the 1 - 100 micrometers range and having dimensional tolerances of order 0.1 micrometers have been demonstrated, consisting of ultra-thin plates, beams, shafts and cantilevers. Self supporting nickel, aluminium, stainless steel and mu-metal plates with thicknesses down to 1 micrometers have then been used for fabricating more complex micro-parts such as disks, gears and cogs by direct writing using focused ion beam (FIB) micromachining with a resolution of 50 nm. The FIB instrument allows in situ imaging during microfabrication using secondary elements or ions, and can be used for inspection during micro-part assembly. A novel process applicable to the production of 3D micro-parts is also described.","is_dataset_classified":null,"base_score":0.0,"endowment":0.0,"datacite_reuse_total":0,"file_count":0,"downloads":0,"views":0,"has_version_chain":false,"is_dataset":false,"is_oa":false,"pmid":"21097893","pmcid":null,"openalex_id":"https://openalex.org/W2098452312","authors":[],"funders":[],"total_grants":0,"fwci":0.0,"citation_percentile":0.30741338,"influential_citations":0,"citation_trend":[],"oa_status":"closed","license":null,"oa_locations":[{"url":"https://doi.org/10.1117/12.250957","host_type":"journal"}],"fields_of_study":["Advanced Surface Polishing Techniques","Integrated Circuits and Semiconductor Failure Analysis","Ion-surface interactions and analysis"],"mesh_terms":[],"keywords":["Surface micromachining","Materials science","Fabrication","Ion beam lithography","Microfabrication","Focused ion beam","Ion beam","Ion milling machine","Etching (microfabrication)","Microelectromechanical systems","Deep reactive-ion etching","Reactive-ion etching","Optoelectronics","Dry etching","Ion implantation","Nanolithography","Nanotechnology","Resist","Ion","Beam (structure)","Optics","Chemistry"],"sdg_mappings":[],"linked_datasets":[],"clinical_trials":[],"software_tools":[],"database_accessions":[],"source":"live","citation_network_status":"fetched"},"created_at":"2026-08-18T11:15:29.826094Z","pmid":null,"pmcid":null,"fwci":null,"citation_percentile":null,"influential_citations":0,"oa_status":null,"license":null,"views":0,"total_file_size_bytes":0,"version_count":0,"fair_f":null,"fair_a":null,"fair_i":null,"fair_r":null,"fair_zscore":null,"fair_rationale":null,"fair_model":null,"fair_agent_version":null,"fair_fulltext_source":null,"fair_has_llm":null,"fair_computed_at":null,"clinical_trials":[],"software_tools":[],"db_accessions":[],"linked_datasets":[],"topics":[]}