{"doi":"10.1117/1.jom.1.4.044001","title":"Micromachined two-axis water-immersible scanning mirror using torsional and bending hinges","abstract":"We report a two-axis water-immersible microscanning mirror using torsional and bending biaxially oriented polyethylene terephthalate hinges. Two different designs based on a four- or single-coil electromagnetic actuator are investigated. A micromachining-based fabrication process is developed to enable high patterning resolution and alignment accuracy and to reduce the amount of manual assembly. With a torsional hinge, the fast axis has a resonance frequency of 300 to 500 Hz in air and 200 to 400 Hz in water. With a bending hinge, the slow axis has a resonance frequency of 60 to 70 Hz in air and 20 to 40 Hz in water. 2D B-scan and 3D volumetric ultrasound microscopy are demonstrated using the hybrid-hinge scanning mirror. The ability of scanning the slow axis at DC or very low frequencies allows a dense raster scanning pattern to be formed for improving both the imaging resolution and field of view.","journal":"Journal of Optical Microsystems","year":2021,"id":195834,"datarank":0.0,"base_score":0.0,"endowment":0.0,"self_citation_contribution":0.0,"citation_network_contribution":0.0,"self_endowment_contribution":0.0,"citer_contribution":0.0,"corpus_percentile":null,"corpus_rank":null,"citation_count":8,"citer_count":0,"citers_with_citation_signal":0,"citers_with_endowment":0,"datacite_reuse_total":0,"is_dataset":false,"is_dataset_confidence":0.9563,"is_data_producer":false,"deposit_databanks":null,"is_oa":true,"file_count":0,"downloads":0,"has_version_chain":false,"published_date":"2021-01-01","fair_score":null,"fair_percentile":null,"algorithm_id":"datarank_citation_only_1hop_v6","ranking_scope":"data_only","authors":[{"id":671101,"name":"Xiaoyu Duan","orcid":"0000-0001-9196-4523","position":1,"is_corresponding":false},{"id":767765,"name":"Jun Zou","orcid":"0000-0003-2443-3516","position":2,"is_corresponding":false},{"id":424294,"name":"Shuangliang Li","orcid":"0000-0002-1786-8733","position":0,"is_corresponding":true}],"reference_count":15,"raw_metadata":null,"created_at":"2026-07-18T23:50:11.609550Z","pmid":null,"pmcid":null,"fwci":null,"citation_percentile":null,"influential_citations":0,"oa_status":null,"license":null,"views":0,"total_file_size_bytes":0,"version_count":0,"fair_f":null,"fair_a":null,"fair_i":null,"fair_r":null,"fair_zscore":null,"fair_rationale":null,"fair_model":null,"fair_agent_version":null,"fair_fulltext_source":null,"fair_has_llm":null,"fair_computed_at":null,"clinical_trials":[],"software_tools":[],"db_accessions":[],"linked_datasets":[],"topics":[]}