{"doi":"10.1109/nano.2004.1392251","title":"Fabrication of magnetic nanostructures using KrF lithography","abstract":null,"journal":"4th IEEE Conference on Nanotechnology, 2004.","year":null,"id":590501,"datarank":0.0,"base_score":0.0,"endowment":0.0,"self_citation_contribution":0.0,"citation_network_contribution":0.0,"self_endowment_contribution":0.0,"citer_contribution":0.0,"corpus_percentile":null,"corpus_rank":null,"citation_count":0,"citer_count":0,"citers_with_citation_signal":0,"citers_with_endowment":0,"datacite_reuse_total":0,"is_dataset":false,"is_dataset_confidence":null,"is_data_producer":false,"deposit_databanks":null,"is_oa":false,"file_count":0,"downloads":0,"has_version_chain":false,"published_date":null,"fair_score":null,"fair_percentile":null,"algorithm_id":"datarank_citation_only_1hop_v6","ranking_scope":"data_only","authors":[{"id":1510837,"name":"S. Goolaup","orcid":null,"position":1,"is_corresponding":false},{"id":1510838,"name":"A.O. Adeyeye","orcid":null,"position":2,"is_corresponding":false},{"id":33446,"name":"N. Singh","orcid":null,"position":0,"is_corresponding":false}],"reference_count":0,"raw_metadata":{"has_enrichment":true,"resolved":true,"title":"Fabrication of magnetic nanostructures using KrF lithography","abstract":"We have developed a large area nanofabrication technique for synthesizing nanomagnetic arrays based on KrF lithographic exposure tool. Using phase shift mask technique and resist trimming, we have fabricated array of complex nanomagnetic structures with dimensions well below the resolution limit of the conventional optical lithography. Magnetic nanostructures of different shapes, complexities and sizes down to 50 nm displaying novel properties have been fabricated using a lift off method.","is_dataset_classified":null,"base_score":0.0,"endowment":0.0,"datacite_reuse_total":0,"file_count":0,"downloads":0,"views":0,"has_version_chain":false,"is_dataset":false,"is_oa":false,"pmid":"26657633","pmcid":null,"openalex_id":"https://openalex.org/W2159726941","authors":[],"funders":[],"total_grants":0,"fwci":null,"citation_percentile":null,"influential_citations":0,"citation_trend":[],"oa_status":"closed","license":null,"oa_locations":[{"url":"https://doi.org/10.1109/nano.2004.1392251","host_type":""},{"url":"http://scholarbank.nus.edu.sg/handle/10635/70279","host_type":"repository"}],"fields_of_study":["Magnetic properties of thin films","Characterization and Applications of Magnetic Nanoparticles","Optical Coatings and Gratings"],"mesh_terms":[],"keywords":["Nanolithography","Lithography","Materials science","Next-generation lithography","Resist","Fabrication","Photolithography","Nanostructure","Nanotechnology","Stepper","Trimming","Electron-beam lithography","Computational lithography","X-ray lithography","Stencil lithography","Optoelectronics","Computer science"],"sdg_mappings":[],"linked_datasets":[],"clinical_trials":[],"software_tools":[],"database_accessions":[],"source":"live","citation_network_status":"fetched"},"created_at":"2026-07-24T23:43:04.126821Z","pmid":null,"pmcid":null,"fwci":null,"citation_percentile":null,"influential_citations":0,"oa_status":null,"license":null,"views":0,"total_file_size_bytes":0,"version_count":0,"fair_f":null,"fair_a":null,"fair_i":null,"fair_r":null,"fair_zscore":null,"fair_rationale":null,"fair_model":null,"fair_agent_version":null,"fair_fulltext_source":null,"fair_has_llm":null,"fair_computed_at":null,"clinical_trials":[],"software_tools":[],"db_accessions":[],"linked_datasets":[],"topics":[]}