{"doi":"10.1109/memsys.2012.6170268","title":"Implementation of vertical-integrated dual mode inductive-capacitive proximity sensor","abstract":null,"journal":"2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS)","year":2012,"id":33211,"datarank":0.9208422825794289,"base_score":2.3978952727983707,"endowment":2.3978952727983707,"self_citation_contribution":0.3596842909197557,"citation_network_contribution":0.5611579916596732,"self_endowment_contribution":0.3596842909197557,"citer_contribution":0.5611579916596732,"corpus_percentile":null,"corpus_rank":null,"citation_count":10,"citer_count":9,"citers_with_citation_signal":8,"citers_with_endowment":8,"datacite_reuse_total":0,"is_dataset":false,"is_dataset_confidence":null,"is_data_producer":false,"deposit_databanks":null,"is_oa":false,"file_count":0,"downloads":0,"has_version_chain":false,"published_date":null,"fair_score":null,"fair_percentile":null,"algorithm_id":"datarank_citation_only_1hop_v6","ranking_scope":"data_only","authors":[{"id":174298,"name":"Chitsung Hong","orcid":null,"position":1,"is_corresponding":false},{"id":174299,"name":"Shih-Hsiung Tseng","orcid":null,"position":2,"is_corresponding":false},{"id":174300,"name":"Jen-Hao Yeh","orcid":null,"position":3,"is_corresponding":false},{"id":174301,"name":"Weileun Fang","orcid":null,"position":4,"is_corresponding":false},{"id":174297,"name":"Pei-Hsuan Lo","orcid":null,"position":0,"is_corresponding":false}],"reference_count":0,"raw_metadata":{"has_enrichment":true,"base_score":2.3978952727983707,"endowment":2.3978952727983707,"datacite_reuse_total":0,"file_count":0,"downloads":0,"views":0,"has_version_chain":false,"is_dataset":false,"is_oa":false,"pmid":"24523987","pmcid":null,"openalex_id":"https://openalex.org/W1998616779","authors":[],"funders":[],"total_grants":0,"fwci":0.7319,"citation_percentile":0.6767289,"influential_citations":0,"citation_trend":[{"year":2013,"count":1},{"year":2014,"count":1},{"year":2015,"count":3},{"year":2016,"count":2},{"year":2017,"count":1},{"year":2022,"count":1},{"year":2023,"count":1}],"oa_status":"closed","license":null,"oa_locations":[{"url":"http://xplorestaging.ieee.org/ielx5/6165525/6170071/06170268.pdf?arnumber=6170268","host_type":"publisher"},{"url":"https://doi.org/10.1109/memsys.2012.6170268","host_type":""}],"fields_of_study":["Anodic Oxide Films and Nanostructures","Smart Materials for Construction","Analytical Chemistry and Sensors","Materials Science","Engineering"],"mesh_terms":[],"keywords":["Capacitive sensing","Electrical conductor","Inductive sensor","Materials science","Proximity sensor","Dielectric","Optoelectronics","Capacitance","STRIPS","Electrical engineering","Electromagnetic coil","Fabrication","Inductive coupling","Electrode","Engineering","Physics"],"sdg_mappings":[{"sdg_number":0,"sdg_label":"Affordable and clean energy"}],"linked_datasets":[],"clinical_trials":[],"software_tools":[],"database_accessions":[],"source":"live","citation_network_status":"fetched"},"created_at":"2026-06-09T15:52:17.331715Z","pmid":null,"pmcid":null,"fwci":null,"citation_percentile":null,"influential_citations":0,"oa_status":null,"license":null,"views":0,"total_file_size_bytes":0,"version_count":0,"fair_f":null,"fair_a":null,"fair_i":null,"fair_r":null,"fair_zscore":null,"fair_rationale":null,"fair_model":null,"fair_agent_version":null,"fair_fulltext_source":null,"fair_has_llm":null,"fair_computed_at":null,"clinical_trials":[],"software_tools":[],"db_accessions":[],"linked_datasets":[],"topics":[]}