{"doi":"10.1109/edssc.2010.5713778","title":"A MEMS-based flexible electrode array using composite substrate","abstract":null,"journal":"2010 IEEE International Conference of Electron Devices and Solid-State Circuits (EDSSC)","year":2010,"id":643699,"datarank":0.24141568686511508,"base_score":1.6094379124341003,"endowment":1.6094379124341003,"self_citation_contribution":0.24141568686511508,"citation_network_contribution":0.0,"self_endowment_contribution":0.24141568686511508,"citer_contribution":0.0,"corpus_percentile":null,"corpus_rank":null,"citation_count":4,"citer_count":0,"citers_with_citation_signal":0,"citers_with_endowment":0,"datacite_reuse_total":0,"is_dataset":false,"is_dataset_confidence":null,"is_data_producer":false,"deposit_databanks":null,"is_oa":false,"file_count":0,"downloads":0,"has_version_chain":false,"published_date":null,"fair_score":null,"fair_percentile":null,"algorithm_id":"datarank_citation_only_1hop_v6","ranking_scope":"data_only","authors":[{"id":1135102,"name":"Bing Yan","orcid":"0000-0003-3291-7721","position":1,"is_corresponding":false},{"id":1674966,"name":"Jian-Hui Lin","orcid":null,"position":2,"is_corresponding":false},{"id":1482522,"name":"Xiao-Ming Wu","orcid":"0000-0002-3130-0554","position":3,"is_corresponding":false},{"id":1674967,"name":"Li-Gang Wang","orcid":null,"position":4,"is_corresponding":false},{"id":722189,"name":"Yi Yang","orcid":"0000-0003-1620-1125","position":5,"is_corresponding":false},{"id":1674968,"name":"Li-Tian Liu","orcid":null,"position":6,"is_corresponding":false},{"id":1674965,"name":"Tian-Ling Ren","orcid":null,"position":0,"is_corresponding":false}],"reference_count":0,"raw_metadata":{"has_enrichment":true,"resolved":true,"title":"A MEMS-based flexible electrode array using composite substrate","abstract":"We present a MEMS-based flexible subdural electrode array for neural recordings. The electrode array is fabricated on a composite substrate of polyimide and biomedical-grade polydimethylsiloxane(PDMS). The electrodes are deposited on polyimide layer, and the whole device is packaged by PDMS. Ablating with a CO2laser is applied to expose the electrodes sites. The surface of the electrodes is modified to increase the surface area, which can decrease interface impedance by nearly 90%. Prototypes of 2×4 and 2×1 arrays are fabricated with exposed electrode diameters of 0.5mm and 2.3mm respectively. After full package, the whole thickness of the electrode array is 0.7mm. For the 2×4 array, the average electrode impedance is 18.9 kΩ for normal 0.5mm electrodes and only 1.58kΩ for surface modified 0.5mm electrodes. The 2×1 array was successfully subdural implanted into a rabbit's brain, and get its electro-corticogram(ECoG).","is_dataset_classified":null,"base_score":1.6094379124341003,"endowment":1.6094379124341003,"datacite_reuse_total":0,"file_count":0,"downloads":0,"views":0,"has_version_chain":false,"is_dataset":false,"is_oa":false,"pmid":"19767382","pmcid":null,"openalex_id":"https://openalex.org/W2152200996","authors":[],"funders":[],"total_grants":0,"fwci":2.3858,"citation_percentile":0.8796034,"influential_citations":0,"citation_trend":[{"year":2012,"count":1},{"year":2014,"count":1}],"oa_status":"closed","license":null,"oa_locations":[{"url":"http://xplorestaging.ieee.org/ielx5/5706405/5713670/05713778.pdf?arnumber=5713778","host_type":"publisher"},{"url":"https://doi.org/10.1109/edssc.2010.5713778","host_type":""}],"fields_of_study":["Neuroscience and Neural Engineering","EEG and Brain-Computer Interfaces","Neural dynamics and brain function"],"mesh_terms":[],"keywords":["Electrode","Polydimethylsiloxane","Materials science","Polyimide","Electrode array","Substrate (aquarium)","Layer (electronics)","Microelectromechanical systems","Composite number","Optoelectronics","Multielectrode array","Electrical impedance","Composite material","Biomedical engineering","Microelectrode","Electrical engineering","Chemistry"],"sdg_mappings":[],"linked_datasets":[],"clinical_trials":[],"software_tools":[],"database_accessions":[],"source":"live","citation_network_status":"fetched"},"created_at":"2026-08-08T18:27:01.128520Z","pmid":null,"pmcid":null,"fwci":null,"citation_percentile":null,"influential_citations":0,"oa_status":null,"license":null,"views":0,"total_file_size_bytes":0,"version_count":0,"fair_f":null,"fair_a":null,"fair_i":null,"fair_r":null,"fair_zscore":null,"fair_rationale":null,"fair_model":null,"fair_agent_version":null,"fair_fulltext_source":null,"fair_has_llm":null,"fair_computed_at":null,"clinical_trials":[],"software_tools":[],"db_accessions":[],"linked_datasets":[],"topics":[]}