{"doi":"10.1093/jmicro/dfx122","title":"Attainment of 40.5 pm spatial resolution using 300 kV scanning transmission electron microscope equipped with fifth-order aberration corrector","abstract":"<jats:title>Abstract</jats:title>\n               <jats:p>The achievement of a fine electron probe for high-resolution imaging in scanning transmission electron microscopy requires technological developments, especially in electron optics. For this purpose, we developed a microscope with a fifth-order aberration corrector that operates at 300 kV. The contrast flat region in an experimental Ronchigram, which indicates the aberration-free angle, was expanded to 70 mrad. By using a probe with convergence angle of 40 mrad in the scanning transmission electron microscope at 300 kV, we attained the spatial resolution of 40.5 pm, which is the projected interatomic distance between Ga–Ga atomic columns of GaN observed along [212] direction.</jats:p>","journal":"Microscopy","year":2018,"id":34825,"datarank":1.8107358318178293,"base_score":4.330733340286331,"endowment":4.330733340286331,"self_citation_contribution":0.6496100010429497,"citation_network_contribution":1.1611258307748795,"self_endowment_contribution":0.6496100010429497,"citer_contribution":1.1611258307748795,"corpus_percentile":null,"corpus_rank":null,"citation_count":75,"citer_count":41,"citers_with_citation_signal":31,"citers_with_endowment":31,"datacite_reuse_total":0,"is_dataset":false,"is_dataset_confidence":null,"is_data_producer":false,"deposit_databanks":null,"is_oa":false,"file_count":0,"downloads":0,"has_version_chain":false,"published_date":null,"fair_score":null,"fair_percentile":null,"algorithm_id":"datarank_citation_only_1hop_v6","ranking_scope":"data_only","authors":[{"id":179652,"name":"Ryo Ishikawa","orcid":null,"position":1,"is_corresponding":false},{"id":179653,"name":"Yuji Kohno","orcid":null,"position":2,"is_corresponding":false},{"id":139609,"name":"Hidetaka Sawada","orcid":null,"position":3,"is_corresponding":false},{"id":179654,"name":"Naoya Shibata","orcid":null,"position":4,"is_corresponding":false},{"id":179655,"name":"Yuichi Ikuhara","orcid":null,"position":5,"is_corresponding":false},{"id":179651,"name":"Shigeyuki Morishita","orcid":null,"position":0,"is_corresponding":false}],"reference_count":0,"raw_metadata":{"has_enrichment":true,"base_score":4.330733340286331,"endowment":4.330733340286331,"datacite_reuse_total":0,"file_count":0,"downloads":0,"views":0,"has_version_chain":false,"is_dataset":false,"is_oa":false,"pmid":"29309606","pmcid":null,"openalex_id":"https://openalex.org/W2796714479","authors":[],"funders":[{"funder_name":"Japan Society for the Promotion of Science","grant_id":"","title":null}],"total_grants":1,"fwci":4.1013,"citation_percentile":0.95283447,"influential_citations":1,"citation_trend":[{"year":2018,"count":6},{"year":2019,"count":9},{"year":2020,"count":9},{"year":2021,"count":9},{"year":2022,"count":8},{"year":2023,"count":7},{"year":2024,"count":11},{"year":2025,"count":11},{"year":2026,"count":5}],"oa_status":"closed","license":null,"oa_locations":[{"url":"http://academic.oup.com/jmicro/article-pdf/67/1/46/35122967/dfx122.pdf","host_type":"publisher"},{"url":"https://doi.org/10.1093/jmicro/dfx122","host_type":"journal"},{"url":"https://pubmed.ncbi.nlm.nih.gov/29309606","host_type":"repository"}],"fields_of_study":["Advanced Electron Microscopy Techniques and Applications","Electron and X-Ray Spectroscopy Techniques","Integrated Circuits and Semiconductor Failure Analysis","Materials Science","Medicine","Engineering","Physics"],"mesh_terms":[],"keywords":["Scanning transmission electron microscopy","Optics","Scanning electron microscope","Contrast transfer function","Resolution (logic)","Conventional transmission electron microscope","Spherical aberration","High-resolution transmission electron microscopy","Materials science","Microscope","Electron tomography","Transmission electron microscopy","Image resolution","Electron","Electron microscope","Scanning confocal electron microscopy","Physics","Lens (geology)","Computer science"],"sdg_mappings":[],"linked_datasets":[],"clinical_trials":[],"software_tools":[],"database_accessions":[],"source":"live","citation_network_status":"fetched"},"created_at":"2026-06-09T20:28:34.181910Z","pmid":null,"pmcid":null,"fwci":null,"citation_percentile":null,"influential_citations":0,"oa_status":null,"license":null,"views":0,"total_file_size_bytes":0,"version_count":0,"fair_f":null,"fair_a":null,"fair_i":null,"fair_r":null,"fair_zscore":null,"fair_rationale":null,"fair_model":null,"fair_agent_version":null,"fair_fulltext_source":null,"fair_has_llm":null,"fair_computed_at":null,"clinical_trials":[],"software_tools":[],"db_accessions":[],"linked_datasets":[],"topics":[]}