{"doi":"10.1063/1.1447588","title":"Vibration-damping structure for an x-ray microprobe supporting system","abstract":"<jats:p>Focusing 8 keV x rays to a spot size of 150 and 90 nm full width at half maximum has been demonstrated at the first- and third-order foci, respectively, of a phase zone plate at the Advanced Photon Source 2-ID-D x-ray microprobe experiment station [Yun et al., Rev. Sci. Instrum. 70, 2238 (1999)]. In order to perform an x-ray microprobe experiment with such a high spatial resolution, vibration control of the x-ray microprobe supporting system becomes a critical issue. Recently, we have designed and constructed a vibration-damping structure for the APS 2-ID-D x-ray microprobe experiment station. In this article the vibration-damping structure design as well as the vibration test results for the x-ray microprobe supporting system are presented. This is an essential improvement toward future operation of the microprobe at sub-100-nm spatial resolution.</jats:p>","journal":"Review of Scientific Instruments","year":2002,"id":669826,"datarank":0.20794415416798362,"base_score":1.3862943611198906,"endowment":1.3862943611198906,"self_citation_contribution":0.20794415416798362,"citation_network_contribution":0.0,"self_endowment_contribution":0.20794415416798362,"citer_contribution":0.0,"corpus_percentile":null,"corpus_rank":null,"citation_count":3,"citer_count":2,"citers_with_citation_signal":0,"citers_with_endowment":0,"datacite_reuse_total":0,"is_dataset":false,"is_dataset_confidence":null,"is_data_producer":false,"deposit_databanks":null,"is_oa":false,"file_count":0,"downloads":0,"has_version_chain":false,"published_date":null,"fair_score":null,"fair_percentile":null,"algorithm_id":"datarank_citation_only_1hop_v6","ranking_scope":"data_only","authors":[{"id":566132,"name":"Barry Lai","orcid":"0000-0002-6061-7155","position":1,"is_corresponding":false},{"id":884472,"name":"Zhonghou Cai","orcid":"0000-0001-8158-6186","position":2,"is_corresponding":false},{"id":1749408,"name":"Deming Shu","orcid":null,"position":3,"is_corresponding":false},{"id":1198014,"name":"Shenglan Xu","orcid":null,"position":0,"is_corresponding":false}],"reference_count":0,"raw_metadata":{"citation_network_status":"fetched"},"created_at":"2026-08-15T05:24:33.607787Z","pmid":null,"pmcid":null,"fwci":null,"citation_percentile":null,"influential_citations":0,"oa_status":null,"license":null,"views":0,"total_file_size_bytes":0,"version_count":0,"fair_f":null,"fair_a":null,"fair_i":null,"fair_r":null,"fair_zscore":null,"fair_rationale":null,"fair_model":null,"fair_agent_version":null,"fair_fulltext_source":null,"fair_has_llm":null,"fair_computed_at":null,"clinical_trials":[],"software_tools":[],"db_accessions":[],"linked_datasets":[],"topics":[]}