{"doi":"10.1063/1.1143262","title":"A combined scanning electron microscope and scanning tunneling microscope for studying nanostructures","abstract":"<jats:p>An instrument which incorporates an electrostatic scanning electron microscope and a scanning tunneling microscope in an ultrahigh vacuum environment has been developed to study nanostructures. To facilitate positioning the nanostructures for examination with the instrument a high precision orthogonal motion sample stage has been designed. The instrument has been applied to locate and study both nanometer size trenches and wires. These structures have been fabricated using electron beam lithography and a polymethlymethacrylate lift-off process.</jats:p>","journal":"Review of Scientific Instruments","year":1992,"id":22246,"datarank":1.6491086291971333,"base_score":2.9444389791664403,"endowment":2.9444389791664403,"self_citation_contribution":0.44166584687496613,"citation_network_contribution":1.2074427823221672,"self_endowment_contribution":0.44166584687496613,"citer_contribution":1.2074427823221672,"corpus_percentile":null,"corpus_rank":null,"citation_count":18,"citer_count":15,"citers_with_citation_signal":13,"citers_with_endowment":13,"datacite_reuse_total":0,"is_dataset":false,"is_dataset_confidence":null,"is_data_producer":false,"deposit_databanks":null,"is_oa":false,"file_count":0,"downloads":0,"has_version_chain":false,"published_date":null,"fair_score":null,"fair_percentile":null,"algorithm_id":"datarank_citation_only_1hop_v6","ranking_scope":"data_only","authors":[{"id":140515,"name":"M. E. Welland","orcid":null,"position":1,"is_corresponding":false},{"id":140514,"name":"G. C. Rosolen","orcid":null,"position":0,"is_corresponding":false}],"reference_count":0,"raw_metadata":{"has_enrichment":true,"base_score":2.9444389791664403,"endowment":2.9444389791664403,"datacite_reuse_total":0,"file_count":0,"downloads":0,"views":0,"has_version_chain":false,"is_dataset":false,"is_oa":false,"pmid":"21071399","pmcid":null,"openalex_id":"https://openalex.org/W2074057632","authors":[],"funders":[],"total_grants":0,"fwci":1.8848,"citation_percentile":0.84962855,"influential_citations":0,"citation_trend":[{"year":2012,"count":1},{"year":2019,"count":1},{"year":2025,"count":1}],"oa_status":"closed","license":null,"oa_locations":[{"url":"https://pubs.aip.org/aip/rsi/article-pdf/63/9/4041/19315228/4041_1_online.pdf","host_type":"publisher"},{"url":"https://doi.org/10.1063/1.1143262","host_type":"journal"},{"url":"http://publications.eng.cam.ac.uk/337907/","host_type":"repository"}],"fields_of_study":["Force Microscopy Techniques and Applications","Advanced Electron Microscopy Techniques and Applications","Surface and Thin Film Phenomena","Physics","Engineering","Materials Science"],"mesh_terms":[],"keywords":["Scanning tunneling microscope","Electron beam-induced deposition","Scanning electron microscope","Materials science","Environmental scanning electron microscope","Conventional transmission electron microscope","Microscope","Nanostructure","Electrochemical scanning tunneling microscope","Electron-beam lithography","Scanning Hall probe microscope","Lithography","Low-voltage electron microscope","Scanning probe microscopy","Optics","Nanotechnology","Nanolithography","Electron microscope","Optoelectronics","Scanning tunneling spectroscopy","Scanning transmission electron microscopy","Fabrication","Resist","Physics"],"sdg_mappings":[],"linked_datasets":[],"clinical_trials":[],"software_tools":[],"database_accessions":[],"source":"live","citation_network_status":"fetched"},"created_at":"2026-06-06T18:24:56.464645Z","pmid":null,"pmcid":null,"fwci":null,"citation_percentile":null,"influential_citations":0,"oa_status":null,"license":null,"views":0,"total_file_size_bytes":0,"version_count":0,"fair_f":null,"fair_a":null,"fair_i":null,"fair_r":null,"fair_zscore":null,"fair_rationale":null,"fair_model":null,"fair_agent_version":null,"fair_fulltext_source":null,"fair_has_llm":null,"fair_computed_at":null,"clinical_trials":[],"software_tools":[],"db_accessions":[],"linked_datasets":[],"topics":[]}