{"name":"Michael Steckner","orcid":"0000-0001-6854-9348","affiliation":"MKS Instruments (United States)","id":1422153,"datarank":0.0,"percentile_rank":0.0,"paper_count":0,"h_index":null,"cited_by_count":null,"works_count":null,"i10_index":null,"openalex_id":null,"last_known_institutions":[],"top_fields":[]}